Invention Application
- Patent Title: SUBSTRATE SUPPORTS INCLUDING METAL-CERAMIC INTERFACES
-
Application No.: US16697472Application Date: 2019-11-27
-
Publication No.: US20200173017A1Publication Date: 2020-06-04
- Inventor: Chidambara A. RAMALINGAM , Juan Carlos ROCHA , Joseph M. POLESE , Katty Marie Lydia Gamon GUYOMARD , Jian LI
- Applicant: Applied Materials, Inc.
- Main IPC: C23C16/458
- IPC: C23C16/458 ; H01L21/683 ; H01J37/32

Abstract:
Embodiments of the present disclosure generally relate to substrate support assemblies used in semiconductor device manufacturing. In one embodiment, a substrate support includes a ceramic body having at least one aperture formed therein defined by a sidewall. A plurality of recesses extend into the sidewall, a rod member is disposed in the at least one aperture, and an eyelet member is circumferentially disposed about the rod member. The eyelet member has a plurality of protrusions extending outwardly therefrom, each disposed in a corresponding recess of the plurality of recesses. A first portion of each protrusion is in contact with a sidewall of the respective recess of the ceramic body and a second portion of each protrusion is separated by a gap from the sidewall of the respective recess of the ceramic body. A first portion of a brazing material is disposed between an upper surface of the at least one aperture and an end of the rod member.
Public/Granted literature
- US11499229B2 Substrate supports including metal-ceramic interfaces Public/Granted day:2022-11-15
Information query
IPC分类: