Invention Application
- Patent Title: SEMICONDUCTOR WAFER STORAGE SYSTEM AND METHOD OF SUPPLYING FLUID FOR SEMICONDUCTOR WAFER STORAGE
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Application No.: US16529082Application Date: 2019-08-01
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Publication No.: US20200176293A1Publication Date: 2020-06-04
- Inventor: Sangkyung LEE , Yong-Jun AHN , Taijo JEON , Kyubum CHO , Jongsam KIM , Gi-Nam PARK , Chul-Jun PARK , Junyong LEE
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@737c2dfd com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@639fbf01
- Main IPC: H01L21/673
- IPC: H01L21/673 ; B05B1/30 ; H01L21/67

Abstract:
A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.
Public/Granted literature
- US10964570B2 Semiconductor wafer storage system and method of supplying fluid for semiconductor wafer storage Public/Granted day:2021-03-30
Information query
IPC分类: