Invention Application
- Patent Title: CONTACT STRUCTURES
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Application No.: US16780046Application Date: 2020-02-03
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Publication No.: US20200176325A1Publication Date: 2020-06-04
- Inventor: Chanro PARK , Stan TSAI
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/768 ; H01L29/06 ; H01L29/45 ; H01L27/088 ; H01L21/321 ; H01L21/311

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to contact structures and methods of manufacture. The method includes: recessing an isolation region between adjacent gate structures and below metallization overburden of source/drain metallization; planarizing the metallization overburden to a level of the adjacent gate structures; and forming source/drain contacts to the source/drain metallization, on sides of and extending above the adjacent gate structures.
Public/Granted literature
- US11257718B2 Contact structures Public/Granted day:2022-02-22
Information query
IPC分类: