Invention Application
- Patent Title: INSPECTION APPARATUS AND SEMICONDUCTOR STRUCTURE-MANUFACTURING APPARATUS INCLUDING THE SAME
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Application No.: US16509835Application Date: 2019-07-12
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Publication No.: US20200185240A1Publication Date: 2020-06-11
- Inventor: Wookrae KIM , Kwangsoo KIM , Gwangsik PARK
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1dd070cf
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/66 ; H01L27/22 ; H01L43/02 ; H01L43/12 ; G01N21/95 ; G01N21/88
Abstract:
An inspection apparatus includes a first optical module including a first light source configured to emit first light to a semiconductor structure, a second light source configured to emit second light different from the first light to a portion adjacent to a portion to which the first light is emitted in the semiconductor structure, a detector configured to detect the second light reflected toward the second light source, and a lock-in amplifier connected to the first optical module and the detector.
Public/Granted literature
- US10699927B1 Inspection apparatus and semiconductor structure-manufacturing apparatus including the same Public/Granted day:2020-06-30
Information query
IPC分类:
