Invention Application
- Patent Title: SELF-ALIGNED CONTACTS FOR THIN FILM TRANSISTORS
-
Application No.: US16638301Application Date: 2017-09-29
-
Publication No.: US20200227568A1Publication Date: 2020-07-16
- Inventor: Van H. LE , Abhishek A. SHARMA , Benjamin CHU-KUNG , Gilbert DEWEY , Ravi PILLARISETTY , Miriam R. RESHOTKO , Shriram SHIVARAMAN , Li Huey TAN , Tristan A. TRONIC , Jack T. KAVALIEROS
- Applicant: Intel Corporation
- International Application: PCT/US2017/054368 WO 20170929
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L29/417 ; H01L29/40

Abstract:
Embodiments herein describe techniques for a semiconductor device, which may include a substrate, and a U-shaped channel above the substrate. The U-shaped channel may include a channel bottom, a first channel wall and a second channel wall parallel to each other, a source area, and a drain area. A gate dielectric layer may be above the substrate and in contact with the channel bottom. A gate electrode may be above the substrate and in contact with the gate dielectric layer. A source electrode may be coupled to the source area, and a drain electrode may be coupled to the drain area. Other embodiments may be described and/or claimed.
Public/Granted literature
- US12183831B2 Self-aligned contacts for thin film transistors Public/Granted day:2024-12-31
Information query
IPC分类: