Invention Application
- Patent Title: SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME
-
Application No.: US16836138Application Date: 2020-03-31
-
Publication No.: US20200235222A1Publication Date: 2020-07-23
- Inventor: Changwoo NOH , Munhyeon KIM , Hansu OH , Sungman WHANG , Dongwon KIM
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@285a87e2
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/311 ; H01L29/786 ; H01L29/423

Abstract:
Semiconductor devices and methods of fabricating the same are provided. The method includes forming on a substrate an active pattern that protrudes from the substrate and extends in one direction; forming on the active pattern a sacrificial gate structure that extends in a direction intersecting the active pattern; forming on a side surface of the sacrificial gate structure a first spacer including a first portion at a lower level than a top surface of the active pattern and a second portion on the first portion, and reducing a thickness of the second portion of the first spacer.
Public/Granted literature
- US11257925B2 Semiconductor devices having a fin-shaped active region and methods of manufacturing the same Public/Granted day:2022-02-22
Information query
IPC分类: