Invention Application
- Patent Title: 3-AXIS ANGULAR ACCELEROMETER
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Application No.: US16775316Application Date: 2020-01-29
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Publication No.: US20200241036A1Publication Date: 2020-07-30
- Inventor: Xin Zhang , Jianglong Zhang , Alan O'Donnell
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/18 ; G01P15/08 ; B81B3/00

Abstract:
Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
Public/Granted literature
- US11313876B2 3-axis angular accelerometer Public/Granted day:2022-04-26
Information query
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