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公开(公告)号：US20220155336A1
公开(公告)日：2022-05-19
申请号：US17589745
申请日：2022-01-31
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Jianglong Zhang , Alan O'Donnell
IPC: G01P15/125 , G01P15/18 , G01P15/08 , B81B3/00
Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
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公开(公告)号：US20170328931A1
公开(公告)日：2017-11-16
申请号：US15400109
申请日：2017-01-06
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Jianglong Zhang
IPC: G01P15/125 , B81B3/00 , G01P15/18
Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
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公开(公告)号：US20200241036A1
公开(公告)日：2020-07-30
申请号：US16775316
申请日：2020-01-29
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Jianglong Zhang , Alan O'Donnell
IPC: G01P15/125 , G01P15/18 , G01P15/08 , B81B3/00
Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
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公开(公告)号：US10520526B2
公开(公告)日：2019-12-31
申请号：US15290991
申请日：2016-10-11
Applicant: Analog Devices, Inc.
Inventor： Jianglong Zhang
IPC: G01P15/097 , G01P15/08
Abstract: A microelectromechanical systems (MEMS) sensor device with a compound folded tether is disclosed. The compound folded tether connects a movable proof mass to a substrate, and includes folds composed of multiple short segments aligned with each other to form a longer composite segment having multiple breaks along its length. The use of multiple short segments to create a longer composite segment of the folded tether provides the tether with increased stiffness without altering the fundamental resonance frequency of the tether. The increased stiffness can beneficially lower the occurrence of stiction. Moreover, such a tether configuration provides larger separation between the tether's fundamental resonance frequency and higher order resonant mode frequencies, meaning that the higher order modes may be suppressed in typical operation of the MEMS sensor device.
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公开(公告)号：US20160377648A1
公开(公告)日：2016-12-29
申请号：US14747456
申请日：2015-06-23
Applicant: Analog Devices, Inc.
Inventor： Jianglong Zhang
IPC: G01P15/125
CPC classification number: G01P15/125 , B81B2203/0181 , G01P2015/0831
Abstract: A teeter-totter type accelerometer includes one or more platforms configured so as to move in proportion to deformation of the substrate and/or anchor(s). The platform(s) may be in a fixed position relative to the substrate, e.g., by being fixedly attached to the anchor(s) or by being fixedly attached to the substrate, or the platform(s) may be movable relative to the substrate, e.g., by being tethered to the anchor(s) so as to allow the platform(s) to pivot relative to the anchor(s). Electrodes are placed on the substrate underlying the platform(s) for sensing position of the platform(s) relative to the underlying substrate. The teeter-totter proof mass is configured such that it can rotate relative to the platform(s), e.g., by being tethered to the platform(s) or by being tethered to one or more anchors separate from the platform(s). The output of the accelerometer is adjusted based on signals from these platform-sensing electrodes in order to reduce or eliminate offset drift.
Abstract translation: 跷跷板型加速度计包括一个或多个平台，其被配置为与基底和/或锚的变形成比例地移动。 平台可以相对于基板处于固定位置，例如通过固定地附接到锚固件或通过固定地附接到基板上，或者平台可以相对于基板移动 例如，通过锚固到锚固件上，以允许平台相对于锚枢转。 电极被放置在平台下面的衬底上，用于感测平台相对于下面的衬底的位置。 跷跷板证明质量体被构造成使得其可以相对于平台旋转，例如通过被束缚到平台或通过与一个或多个与平台分开的一个或多个锚固件而被束缚。 基于来自这些平台感测电极的信号来调节加速度计的输出，以便减少或消除偏移漂移。
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Patent Agency Ranking
公开(公告)号：US09027403B2
公开(公告)日：2015-05-12
申请号：US13856082
申请日：2013-04-03
Applicant: Analog Devices, Inc.
Inventor： Jianglong Zhang
IPC: G01P15/125 , B81B7/02 , G01P15/00
CPC classification number: B81B7/02 , G01P15/00 , G01P15/125
Abstract: A MEMS device includes a substrate, a mass having a first and second set of elongated mass fingers extending from the mass, and a support structure supporting the mass on the substrate. The support structure may include at least one anchor and a plurality of springs that allow movement of the mass relative to the substrate. The MEMS device may also include a first set of sensing fingers for sensing movement of the first set of mass fingers relative to the first set of sensing fingers, and a second set of sensing figures for sensing movement of the second set of mass fingers relative to the second set of sensing fingers. The first and second sets of sensing fingers may have different size finger gaps between the sensing fingers and the respective mass fingers.
Abstract translation: MEMS器件包括衬底，具有从质量块延伸的第一和第二组细长质量指状物的质量块，以及支撑在衬底上的质量块的支撑结构。 支撑结构可以包括允许质量块相对于衬底移动的至少一个锚和多个弹簧。 MEMS装置还可以包括用于感测第一组质量指状物相对于第一组感测手指的运动的第一组感测手指，以及用于感测第二组质量指的运动相对于第一组感测手指的第二组感测图 第二组感测手指。 第一组和第二组感测指可以在感测指和相应的质量指之间具有不同大小的手指间隙。
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公开(公告)号：US12153065B2
公开(公告)日：2024-11-26
申请号：US17589745
申请日：2022-01-31
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Jianglong Zhang , Alan O'Donnell
Abstract: Sensing devices are described. A sensing device includes an inertial sensor, a read-out circuit configured to determine first data indicative of an acceleration of the structure using an output of the inertial sensor, an energy harvester configured to capture energy, and a power management unit. The power management unit comprises a plurality of energy storage components coupled to the energy harvester and a plurality of switches coupled to respective energy storage components of the plurality of energy storage components. The power management unit monitors energy levels stored in the energy storage components, selectively charges the plurality of energy storage components by selectively activating the plurality of switches, and provides power to one or more of the inertial sensor and the read-out circuit based on the monitored energy levels.
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公开(公告)号：US11313876B2
公开(公告)日：2022-04-26
申请号：US16775316
申请日：2020-01-29
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Jianglong Zhang , Alan O'Donnell
Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
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公开(公告)号：US20200096538A1
公开(公告)日：2020-03-26
申请号：US16138091
申请日：2018-09-21
Applicant: Analog Devices, Inc.
Inventor： Jianglong Zhang , Xin Zhang
IPC: G01P15/125 , G01P15/08 , G01P15/18
Abstract: A three-axis accelerometer includes a single, integrated mass including at least one lateral (x-y) proof mass and at least one vertical (z) proof mass. The vertical proof mass is arranged as a teeter-totter mass, which is located within the lateral proof mass. The vertical proof mass is mechanically coupled to the lateral proof mass with one or more torsional springs, and the lateral proof mass is mechanically coupled to one or more anchors with one or more lateral springs. The at least one vertical proof mass may be symmetrically positioned about one or more axes of the three-axis accelerometer, so that the 3-axis accelerometer has in-plane symmetry. The three-axis accelerometer may be less susceptible for mechanical cross-talk or noise and may provide a smaller packaged solution for sensing acceleration in three directions.
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公开(公告)号：US10514259B2
公开(公告)日：2019-12-24
申请号：US15253792
申请日：2016-08-31
Applicant: Analog Devices, Inc.
Inventor： Kemiao Jia , Xin Zhang , Jianglong Zhang , Jinbo Kuang
IPC: G01C19/5705 , G01C19/5712
Abstract: A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.
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