Invention Application
- Patent Title: CONTACT PATTERNING
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Application No.: US16259330Application Date: 2019-01-28
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Publication No.: US20200243540A1Publication Date: 2020-07-30
- Inventor: Byung Yoon Kim
- Applicant: Micron Technology, Inc.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/02 ; H01G4/08 ; H01G4/012 ; H01G4/008

Abstract:
Methods, apparatuses, and systems related to patterning a material over a sense line contact are described. An example method includes forming a sense line contact pattern at an angle to a sense line direction over semiconductor structures on a substrate, wherein the angle to the sense line direction is formed along a path between a sense line contact in a first sense line column and a sense line contact in a second sense line column. The example method further includes removing a portion of a mask material corresponding to the sense line contact pattern to form sense line contacts.
Public/Granted literature
- US11152375B2 Contact patterning Public/Granted day:2021-10-19
Information query
IPC分类: