Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
-
Application No.: US16816423Application Date: 2020-03-12
-
Publication No.: US20200273886A1Publication Date: 2020-08-27
- Inventor: Hajime KIMURA , Tsutomu MURAKAWA , Kosei NEI , Hiroaki HONDA , Yusuke SHINO
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@67208c51
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L21/84

Abstract:
A semiconductor device which can suppress leakage current between a wiring and a connection electrode connected to a floating node is provided. The semiconductor device includes a first insulator, a first conductor over the first insulator, a second conductor over the first insulator, and a second insulator over the first insulator, the first conductor, and the second conductor. The first conductor and the second conductor contain a metal A (one kind or a plurality of kinds of aluminum, copper, tungsten, chromium, silver, gold, platinum, tantalum, nickel, molybdenum, magnesium, beryllium, indium, and ruthenium). The metal A is detected in an interface between the first insulator and the second insulator by an energy dispersive X-ray spectroscopy (EDX). The second insulator includes a groove for exposing the first insulator between the first conductor and the second conductor.
Public/Granted literature
- US10971528B2 Semiconductor device Public/Granted day:2021-04-06
Information query
IPC分类: