发明申请
- 专利标题: CONTROLLING EXHAUST GAS PRESSURE OF A PLASMA REACTOR FOR PLASMA STABILITY
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申请号: US16790644申请日: 2020-02-13
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公开(公告)号: US20200312629A1公开(公告)日: 2020-10-01
- 发明人: George Stephen Leonard, III , Stefan Andrew McClelland , Fei Xie , Wei Li , Curtis Peter Tom , Jae Mo Koo
- 申请人: ReCarbon, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: ReCarbon, Inc.
- 当前专利权人: ReCarbon, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H05H1/46
摘要:
The present invention provides a plasma generating system that includes: a plurality of plasma reactors. Each plurality of plasma reactors includes: a waveguide for transmitting a microwave energy therethrough; a plasma chamber coupled to the waveguide and configured to generate a plasma therein using the microwave energy; a gas inlet for introducing a gas into the plasma chamber; an exhaust gas pipe for carrying an exhaust gas from the plasma chamber, wherein the plasma converts the gas into the exhaust gas; and a pressure control device installed in the exhaust gas pipe and configured to control a pressure of the exhaust gas in the exhaust gas pipe. The plasma generating system also includes a manifold coupled to the exhaust gas pipes of the plurality of plasma reactors and configured to receive the exhaust gas from the exhaust gas pipes.
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