- 专利标题: PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING THE SAME, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
-
申请号: US17031067申请日: 2020-09-24
-
公开(公告)号: US20210011378A1公开(公告)日: 2021-01-14
- 发明人: Kei YAMAMOTO , Yasufumi OISHI , Noahiro TANGO , Hidenori TAKAHASHI
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2018-058907 20180326
- 主分类号: G03F7/027
- IPC分类号: G03F7/027 ; G03F7/004 ; C08L33/06 ; C08L33/14
摘要:
A photosensitive resin composition including an ethylenically unsaturated compound, a resin having a polarity that increases by the action of an acid, and metal atoms, in which a total content of the metal atoms is from 1 ppt to 30 ppb with respect to a total mass of the photosensitive resin composition, and a content of the ethylenically unsaturated compound is from 0.0001% by mass to 1% by mass with respect to the total mass of the photosensitive resin composition, and a method for producing the same; and a resist film, a pattern forming method, and a method for manufacturing an electronic device, each of which uses the photosensitive resin composition.
信息查询
IPC分类: