Invention Application
- Patent Title: PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING THE SAME, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
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Application No.: US17031067Application Date: 2020-09-24
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Publication No.: US20210011378A1Publication Date: 2021-01-14
- Inventor: Kei YAMAMOTO , Yasufumi OISHI , Noahiro TANGO , Hidenori TAKAHASHI
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2018-058907 20180326
- Main IPC: G03F7/027
- IPC: G03F7/027 ; G03F7/004 ; C08L33/06 ; C08L33/14

Abstract:
A photosensitive resin composition including an ethylenically unsaturated compound, a resin having a polarity that increases by the action of an acid, and metal atoms, in which a total content of the metal atoms is from 1 ppt to 30 ppb with respect to a total mass of the photosensitive resin composition, and a content of the ethylenically unsaturated compound is from 0.0001% by mass to 1% by mass with respect to the total mass of the photosensitive resin composition, and a method for producing the same; and a resist film, a pattern forming method, and a method for manufacturing an electronic device, each of which uses the photosensitive resin composition.
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