- 专利标题： SYSTEMS AND METHODS FOR INSPECTION STATIONS
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申请号： US17074191申请日： 2020-10-19
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公开(公告)号： US20210035834A1公开(公告)日： 2021-02-04
- 发明人: Yan-Hong Liu , Chien-Chih Wu , Che-Fu Chen
- 申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址： TW Hsinchu City
- 专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址： TW Hsinchu City
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/677 ; H01L21/687 ; G06T7/00
摘要：
In an embodiment, a workstation includes: a processing chamber configured to process a workpiece; a load port configured to interface with an environment external to the workstation; a robotic arm configured to transfer the workpiece between the load port and the processing chamber; and a defect sensor configured to detect a defect along a surface of the workpiece when transferred between the load port and the processing chamber.
公开/授权文献
- US12040205B2 Systems and methods for inspection stations 公开/授权日：2024-07-16
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