Invention Application
- Patent Title: VERTICAL MEMORY DEVICES
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Application No.: US16809059Application Date: 2020-03-04
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Publication No.: US20210036008A1Publication Date: 2021-02-04
- Inventor: Kyunghwa YUN , Chanho KIM , Dongku KANG
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2019-0092970 20190731
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565

Abstract:
A vertical memory device is provided. The vertical memory device includes gate electrodes formed on a substrate and spaced apart from each other in a first direction substantially perpendicular to an upper surface of the substrate, the gate electrodes including a first gate electrode and a second gate electrode that is interposed between the first gate electrode and the substrate; a channel extending through the gate electrodes in the first direction; an insulating isolation pattern extending through the first gate electrode in the first direction, and spaced apart from the first gate electrode in a second direction substantially parallel to the upper surface of the substrate; and a blocking pattern disposed on an upper surface, a lower surface and a sidewall of each of the gate electrodes, the sidewall of the gate electrodes facing the channel. The insulating isolation pattern directly contacts the first gate electrode.
Public/Granted literature
- US11430804B2 Vertical memory devices Public/Granted day:2022-08-30
Information query
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