• Patent Title: PROCESS FOR PRODUCING PREPARING A THIN LAYER OF FERROELECTRIC MATERIAL
  • Application No.: US16980310
    Application Date: 2019-02-18
  • Publication No.: US20210036124A1
    Publication Date: 2021-02-04
  • Inventor: Alexis Drouin
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Priority: FR1852122 20180312
  • International Application: PCT/FR2019/050356 WO 20190218
  • Main IPC: H01L29/51
  • IPC: H01L29/51 H01L21/762 H01L21/02
PROCESS FOR PRODUCING PREPARING A THIN LAYER OF FERROELECTRIC MATERIAL
Abstract:
A process for preparing a thin layer made of ferroelectric material based on alkali metal, exhibiting a determined Curie temperature, transferred from a donor substrate to a carrier substrate by using a transfer technique including implanting light species into the donor substrate in order to produce an embrittlement plane, the thin layer having a first, free face and a second face that is arranged on the carrier substrate. The process comprises a first heat treatment of the transferred thin layer at a temperature higher than the Curie temperature, the thin layer exhibiting a multi-domain character upon completion of the first heat treatment, and introducing, after the first heat treatment, protons into the thin layer, followed by applying a second heat treatment of the thin layer at a temperature lower than the Curie temperature to generate an internal electric field that results in the thin layer being made single domain.
Public/Granted literature
Information query
Patent Agency Ranking
0/0