Invention Application
- Patent Title: ACOUSTIC WAVE DEVICE
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Application No.: US16928024Application Date: 2020-07-14
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Publication No.: US20210036211A1Publication Date: 2021-02-04
- Inventor: Takashi OSAWA , Masaki TSUTSUMI , Masahiro FUKUSHIMA
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-shi
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo-shi
- Priority: JP2019-140698 20190731
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/047 ; H01L41/09

Abstract:
An acoustic wave device includes a piezoelectric substrate made of LiNbO3 or LiTaO3 and including first and second main surfaces that face each other, a functional electrode provided on the first main surface of the piezoelectric substrate to excite acoustic waves, and a Li2CO3 layer provided on the second main surface of the piezoelectric substrate.
Public/Granted literature
- US11637232B2 Acoustic wave device including Li2CO3 layer on piezoelectric substrate made of LiNbO3 or LiTaO3 Public/Granted day:2023-04-25
Information query
IPC分类: