- 专利标题： PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND METHOD OF MANUFACTURING THE PIEZOELECTRIC LAMINATE
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申请号： US16942808申请日： 2020-07-30
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公开(公告)号： US20210036212A1公开(公告)日： 2021-02-04
- 发明人: Kenji SHIBATA , Kazutoshi WATANABE , Toshiaki KURODA
- 申请人： SUMITOMO CHEMICAL COMPANY, LIMITED
- 申请人地址： JP Tokyo
- 专利权人： SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人： SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人地址： JP Tokyo
- 优先权： JP2019-143326 20190802
- 主分类号： H01L41/187
- IPC分类号： H01L41/187 ; H01L41/08 ; H01L41/27 ; H01L41/047
摘要：
There is provided a piezoelectric laminate, including: a substrate; an electrode film formed on the substrate; a layer comprised of lanthanum nickel oxide and formed on the electrode film; and a piezoelectric film formed on the layer comprised of lanthanum nickel oxide, and comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K1−xNax)NbO3 (0
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