Invention Application
- Patent Title: EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS INCLUDING EXHAUST COMPONENT
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Application No.: US17010561Application Date: 2020-09-02
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Publication No.: US20210071296A1Publication Date: 2021-03-11
- Inventor: Toshiharu Watarai , Hiroki Arai , Toshio Nakanishi , Yoshiyuki Kikuchi , Ryo Miyama
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/50
Abstract:
Examples of a cleaning method includes supplying a cleaning gas into an exhaust duct that provides an exhaust flow passage of a gas supplied to an area above a susceptor, the exhaust duct having a shape surrounding the susceptor in plan view, and activating the cleaning gas to clean an inside of the exhaust duct.
Information query
IPC分类:
