- 专利标题: FOCUS-LESS INSPECTION APPARATUS AND METHOD
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申请号: US17123901申请日: 2020-12-16
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公开(公告)号: US20210102903A1公开(公告)日: 2021-04-08
- 发明人: Chan Kwon LEE , Moon Young JEON , Jung HUR , Deok Hwa HONG , Eun Ha JO
- 申请人: KOH YOUNG TECHNOLOGY INC.
- 申请人地址: KR Seoul
- 专利权人: KOH YOUNG TECHNOLOGY INC.
- 当前专利权人: KOH YOUNG TECHNOLOGY INC.
- 当前专利权人地址: KR Seoul
- 优先权: KR10-2018-0122354 20181015,KR10-2018-0159872 20181212
- 主分类号: G01N21/95
- IPC分类号: G01N21/95 ; G01N21/47
摘要:
The present disclosure proposes an inspection apparatus. The inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.
公开/授权文献
- US11360031B2 Focus-less inspection apparatus and method 公开/授权日:2022-06-14
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