APPARATUS AND METHOD FOR MEASURING A THREE-DIMENSIONAL SHAPE

    公开(公告)号:US20210207954A1

    公开(公告)日:2021-07-08

    申请号:US17212219

    申请日:2021-03-25

    摘要: Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.

    FOCUS-LESS INSPECTION APPARATUS AND METHOD

    公开(公告)号:US20220260503A1

    公开(公告)日:2022-08-18

    申请号:US17735521

    申请日:2022-05-03

    IPC分类号: G01N21/95 G01N21/47

    摘要: An inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.

    WAVELENGTH-CHANGEABLE LASER APPARATUS AND TUNING METHOD USING THE SAME
    3.
    发明申请
    WAVELENGTH-CHANGEABLE LASER APPARATUS AND TUNING METHOD USING THE SAME 审中-公开
    波长可变的激光装置和使用它的调谐方法

    公开(公告)号:US20130314757A1

    公开(公告)日:2013-11-28

    申请号:US13900365

    申请日:2013-05-22

    IPC分类号: G02B26/10 F21V13/12

    CPC分类号: G02B26/105 F21V13/12

    摘要: A wavelength-changeable laser apparatus including a laser light source, a collimating lens, a diffraction grating, and a mirror is shown. The laser light source provides a laser light. The collimating lens collects the laser light provided from the laser light source and providing a light that is substantially parallel. The diffraction grating diffracts the light provided from the collimating lens. The mirror reflects the light provided from the diffraction grating back to the diffraction grating, a rotation axis rotatable within a predetermined range of a tuning angle being set therein so that a wavelength of the laser light is changed in a mode hopping form, the minor rotating based on the rotation axis serving as a pivot point. Therefore, a wavelength change speed may be increased and a stability of wavelength change may be improved.

    摘要翻译: 示出了包括激光光源,准直透镜,衍射光栅和反射镜的波长可变激光装置。 激光源提供激光。 准直透镜收集从激光光源提供的激光并提供基本平行的光。 衍射光栅衍射由准直透镜提供的光。 反射镜将从衍射光栅提供的光反射回衍射光栅,可在其中设置调谐角的预定范围内旋转的旋转轴,使得激光的波长以模式跳跃形式改变,小转动 基于作为枢轴点的旋转轴。 因此,可以增加波长变化速度,并且可以提高波长变化的稳定性。

    FOCUS-LESS INSPECTION APPARATUS AND METHOD
    4.
    发明公开

    公开(公告)号:US20240060908A1

    公开(公告)日:2024-02-22

    申请号:US18499784

    申请日:2023-11-01

    IPC分类号: G01N21/95 G01N21/47

    CPC分类号: G01N21/9501 G01N21/4738

    摘要: An inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.

    INSPECTION APPARATUS
    6.
    发明申请

    公开(公告)号:US20210254966A1

    公开(公告)日:2021-08-19

    申请号:US16764706

    申请日:2018-11-15

    发明人: Jung HUR Woo Jae CHOI

    IPC分类号: G01B11/16 G01B11/24

    摘要: An inspection apparatus for inspecting the appearance of an inspection target object is provided. The inspection apparatus according to one embodiment of the present disclosure includes a support part configured to hold an inspection target object such that a side surface of the inspection target object faces a predetermined direction, a light source configured to irradiate light toward the inspection target object, a diffusion reflector configured to diffusely reflect at least a part of the irradiated light to irradiate the reflected light to the side surface of the inspection target object, and at least one inspection part configured to inspect the inspection target object by receiving the light reflected from the inspection target object and the diffusion reflector.

    FOCUS-LESS INSPECTION APPARATUS AND METHOD

    公开(公告)号:US20210102903A1

    公开(公告)日:2021-04-08

    申请号:US17123901

    申请日:2020-12-16

    IPC分类号: G01N21/95 G01N21/47

    摘要: The present disclosure proposes an inspection apparatus. The inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.

    APPARATUS AND METHOD FOR MEASURING A THREE DIMENSIONAL SHAPE

    公开(公告)号:US20190293413A1

    公开(公告)日:2019-09-26

    申请号:US15929142

    申请日:2019-06-12

    摘要: Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.

    APPARATUS AND METHOD FOR MEASURING A THREE DIMENSIONAL SHAPE

    公开(公告)号:US20140354804A1

    公开(公告)日:2014-12-04

    申请号:US14463269

    申请日:2014-08-19

    IPC分类号: G01B11/25 H04N5/247

    摘要: Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.