Invention Application
- Patent Title: METHOD FOR SLICING INGOT AND WIRE SAW
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Application No.: US17042236Application Date: 2019-04-10
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Publication No.: US20210114257A1Publication Date: 2021-04-22
- Inventor: Keiichi KANBAYASHI
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP2018-94020 20180515
- International Application: PCT/JP2019/015533 WO 20190410
- Main IPC: B28D5/04
- IPC: B28D5/04 ; B24B27/06

Abstract:
A method for slicing an ingot, including: forming a wire row by a wire spirally wound between a plurality of wire guides and configured to travel in an axial direction; and pressing an ingot against the wire row while supplying a contact portion between the ingot and the wire with a slurry from a nozzle, thereby slicing the ingot into wafers. The slurry is supplied such that slurries whose temperatures are separately controlled by two or more lines of heat exchangers are respectively supplied from two or more sections of the nozzle which are orthogonal to a travelling direction of the wire row. Consequently, a wire saw and a method for slicing an ingot are provided which enable separate control of wafer shapes depending on ingot-slicing positions.
Public/Granted literature
- US12186939B2 Method for slicing ingot and wire saw Public/Granted day:2025-01-07
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