发明申请
- 专利标题: ROBOT SYSTEM, ROBOT CONTROLLING METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM
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申请号: US17090925申请日: 2020-11-06
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公开(公告)号: US20210143047A1公开(公告)日: 2021-05-13
- 发明人: Go YAMAGUCHI , Hiromitsu AKAE
- 申请人: KABUSHIKI KAISHA YASKAWA DENKI
- 申请人地址: JP Fukuoka
- 专利权人: KABUSHIKI KAISHA YASKAWA DENKI
- 当前专利权人: KABUSHIKI KAISHA YASKAWA DENKI
- 当前专利权人地址: JP Fukuoka
- 优先权: JP2019-203707 20191111
- 主分类号: H01L21/687
- IPC分类号: H01L21/687 ; B25J9/04 ; B25J9/00 ; B25J11/00 ; H01L21/67
摘要:
A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.
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