ROBOT HAND AND ROBOT
    1.
    发明申请
    ROBOT HAND AND ROBOT 有权
    机器手和机器人

    公开(公告)号:US20140117686A1

    公开(公告)日:2014-05-01

    申请号:US14149817

    申请日:2014-01-08

    发明人: Hiromitsu AKAE

    IPC分类号: B25J15/00

    摘要: An object is to provide a robot hand and a robot that are compact and lightweight and can reliably hold various types of workpieces. To achieve this object, the robot hand and the robot include: a plurality of joint portions that rotates about respective rotation axes parallel with each other; a plurality of links that is connected via each of the joint portions in sequence from a distal end; a linking member that links rotations of the joint portions adjacent to each other; and a single drive source that drives only the joint portion at a proximal end to rotate the joint portion.

    摘要翻译: 目的在于提供一种紧凑轻巧的机器人手和机器人,可以可靠地保持各种类型的工件。 为了实现该目的,机器人手和机器人包括:围绕各自的旋转轴线彼此平行旋转的多个接合部分; 多个连杆,其从前端依次连接经由各接合部; 连接构件,其将所述接合部的旋转彼此相邻地连接; 以及单个驱动源,其仅在近端仅驱动关节部分以旋转关节部分。

    CONVEYING SYSTEM, METHOD FOR CONTROLLING CONVEYING SYSTEM, AND LINEAR MOTOR

    公开(公告)号:US20210155421A1

    公开(公告)日:2021-05-27

    申请号:US17165937

    申请日:2021-02-03

    摘要: A conveying system includes a guide constituting a conveying path, a carrier configured to move along the conveying path, a magnetic member provided on one of the guide and the carrier so as to be arranged along the conveying path, a plurality of coils provided on the other one of the guide and the carrier and configured to generate thrust along the conveying path by generating a moving magnetic field acting on the magnetic member in accordance with supply of power, a magnetic sensor configured to detect magnetism varying with a movement of the carrier, and a controller which is configured to execute position detection of a first method of obtaining a position of the carrier based on inductance variation of the coil and execute position detection of a second method of obtaining a position of the carrier based on an output of the magnetic sensor.

    VACUUM ROBOT, VACUUM MOTOR, AND VACUUM MOTOR ENCODER

    公开(公告)号:US20210151343A1

    公开(公告)日:2021-05-20

    申请号:US17090922

    申请日:2020-11-06

    摘要: A first vacuum motor includes a first pivoting shaft member, a bearing that rotatably supports the first pivoting shaft member, a disk disposed to be rotatable together with the first pivoting shaft member and having slits, a first bracket that is made of a non-magnetic material and supports the bearing, a recess formed in the first bracket to be dented in the axial direction, and a sensor unit disposed to face the disk in the axial direction via a thin wall formed by the recess. By the thin wall, the space where the sensor unit is disposed under the atmospheric pressure is isolated from the space where the disk is disposed under a reduced pressure lower than the atmospheric pressure.

    TRANSFER SYSTEM, TRANSFER METHOD, AND TRANSFER APPARATUS

    公开(公告)号:US20210242052A1

    公开(公告)日:2021-08-05

    申请号:US17117869

    申请日:2020-12-10

    摘要: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.

    ROBOT SYSTEM, ROBOT CONTROLLING METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM

    公开(公告)号:US20210143047A1

    公开(公告)日:2021-05-13

    申请号:US17090925

    申请日:2020-11-06

    摘要: A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.

    COMPOSITE DRIVE DEVICE AND ROBOT
    6.
    发明申请
    COMPOSITE DRIVE DEVICE AND ROBOT 审中-公开
    复合驱动装置和机器人

    公开(公告)号:US20140148293A1

    公开(公告)日:2014-05-29

    申请号:US14168005

    申请日:2014-01-30

    发明人: Hiromitsu AKAE

    IPC分类号: F16H37/08

    摘要: The composite drive device includes a first output shaft supported rotatably around its axis, a first differential mechanism and a second differential mechanism arranged to face each other on the first output shaft, a first power source driving the first differential mechanism and a second power source driving the second differential mechanism, and a second output shaft being provided in a direction orthogonal to the first output shaft between the first differential mechanism and the second differential mechanism and being rotatable around its axis in conjunction with driving of the first differential mechanism and the second differential mechanism.

    摘要翻译: 复合驱动装置包括绕其轴线可旋转地支撑的第一输出轴,在第一输出轴上彼此相对布置的第一差动机构和第二差动机构,驱动第一差速机构的第一动力源和第二动力源驱动 所述第二差速机构和第二输出轴在所述第一差速机构和所述第二差速机构之间沿与所述第一输出轴正交的方向设置,并且可随着所述第一差速机构和所述第二差动机构的驱动而围绕其轴线旋转 机制。

    TRANSFER SYSTEM, TRANSFER METHOD, AND TRANSFER APPARATUS

    公开(公告)号:US20220310423A1

    公开(公告)日:2022-09-29

    申请号:US17840697

    申请日:2022-06-15

    摘要: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.

    SUBSTRATE TRANSPORT WITH MOBILE BUFFER

    公开(公告)号:US20220111539A1

    公开(公告)日:2022-04-14

    申请号:US17557044

    申请日:2021-12-21

    摘要: The transport device provided in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction, the transport device comprising: a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber; a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall; and a mobile buffer configured to: hold the substrate; and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position, wherein the movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.