Invention Application
- Patent Title: NONVOLATILE MEMORY DEVICE HAVING A FERROELECTRIC LAYER
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Application No.: US16891544Application Date: 2020-06-03
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Publication No.: US20210175253A1Publication Date: 2021-06-10
- Inventor: Jae Hyun HAN , Jae Gil LEE , Hyangkeun YOO , Se Ho LEE
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2019-0163139 20191209
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/11587

Abstract:
A nonvolatile memory device according to an embodiment includes a substrate having an upper surface, and a gate structure disposed over the substrate. The gate structure includes at least one gate electrode layer pattern and at least one gate insulation layer pattern, which are alternately stacked along a first direction perpendicular to the upper surface. The gate structure extends in a second direction perpendicular to the first direction. The nonvolatile memory device includes a ferroelectric layer disposed on at least a portion of one sidewall surface of the gate structure. The one sidewall surface of the gate structure forms a plane substantially parallel to the first and second directions. The nonvolatile memory device includes a channel layer disposed on the ferroelectric layer, and a source electrode structure and a drain electrode structure disposed to contact the channel layer and spaced apart from each other in the second direction.
Public/Granted literature
- US11456318B2 Nonvolatile memory device having a ferroelectric layer Public/Granted day:2022-09-27
Information query
IPC分类: