- 专利标题: INSPECTION APPARATUS
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申请号: US16764706申请日: 2018-11-15
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公开(公告)号: US20210254966A1公开(公告)日: 2021-08-19
- 发明人: Jung HUR , Woo Jae CHOI
- 申请人: KOH YOUNG TECHNOLOGY INC.
- 申请人地址: KR Seoul
- 专利权人: KOH YOUNG TECHNOLOGY INC.
- 当前专利权人: KOH YOUNG TECHNOLOGY INC.
- 当前专利权人地址: KR Seoul
- 优先权: KR10-2017-0152385 20171115
- 国际申请: PCT/KR2018/013944 WO 20181115
- 主分类号: G01B11/16
- IPC分类号: G01B11/16 ; G01B11/24
摘要:
An inspection apparatus for inspecting the appearance of an inspection target object is provided. The inspection apparatus according to one embodiment of the present disclosure includes a support part configured to hold an inspection target object such that a side surface of the inspection target object faces a predetermined direction, a light source configured to irradiate light toward the inspection target object, a diffusion reflector configured to diffusely reflect at least a part of the irradiated light to irradiate the reflected light to the side surface of the inspection target object, and at least one inspection part configured to inspect the inspection target object by receiving the light reflected from the inspection target object and the diffusion reflector.
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