Invention Application
- Patent Title: PHASED ARRAY STEERING FOR LASER BEAM POSITIONING SYSTEMS
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Application No.: US17326664Application Date: 2021-05-21
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Publication No.: US20210291296A1Publication Date: 2021-09-23
- Inventor: Jan Kleinert
- Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
- Applicant Address: US OR Beaverton
- Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC.
- Current Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC.
- Current Assignee Address: US OR Beaverton
- Main IPC: B23K26/03
- IPC: B23K26/03 ; B23K26/067 ; B23K26/035 ; H01S3/067 ; H01S3/10

Abstract:
A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support.
Information query
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