公开(公告)号：US11705686B2

公开(公告)日：2023-07-18

申请号：US16636605

申请日：2018-09-20

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： James Brookhyser ,  Jan Kleinert ,  Jered Richter ,  Kurt Eaton

IPC: H01S3/106 ,  G02F1/33 ,  G02F1/29 ,  G02B6/42 ,  G02F1/00 ,  H01S5/12 ,  H01S5/14 ,  G02B26/06

CPC classification number: H01S3/1068 ,  G02B6/42 ,  G02B26/06 ,  G02F1/00 ,  G02F1/292 ,  G02F1/33 ,  H01S5/124 ,  H01S5/145

Abstract: A beam positioner can be broadly characterized as including a first acousto-optic (AO) deflector (AOD) operative to diffract an incident beam of linearly polarized laser light, wherein the first AOD has a first diffraction axis and wherein the first AOD is oriented such that the first diffraction axis has a predetermined spatial relationship with the plane of polarization of the linearly polarized laser light. The beam positioner can include at least one phase-shifting reflector arranged within a beam path along which light is propagatable from the first AOD. The at least one phase-shifting reflector can be configured and oriented to rotate the plane of polarization of light diffracted by the first AOD.

公开(公告)号：US20180243872A1

公开(公告)日：2018-08-30

申请号：US15966615

申请日：2018-04-30

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian XU ,  Jan Kleinert ,  Zhibin Lin ,  Jim D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: B23Q15/14 ,  G05B19/402

CPC classification number: B23Q15/14 ,  G05B19/19 ,  G05B19/402 ,  G05B2219/34015 ,  G05B2219/41196 ,  G05B2219/41217 ,  G05B2219/41427 ,  G05B2219/50218

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

公开(公告)号：US20160243646A1

公开(公告)日：2016-08-25

申请号：US15047279

申请日：2016-02-18

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Jan Kleinert ,  Fumiyo Yoshino ,  Corie Neufeld ,  Jeremy Willey ,  Mehmet Alpay

IPC: B23K26/067 ,  B23K26/364 ,  B23K26/08 ,  H01S3/00 ,  B23K26/00

CPC classification number: B23K26/364 ,  B23K26/0006 ,  B23K26/066 ,  B23K26/0676 ,  B23K26/08 ,  B23K26/082 ,  B23K26/0823 ,  B23K26/0853 ,  B23K26/352 ,  B23K26/355 ,  B23K26/359 ,  B23K2101/40 ,  B23K2103/50 ,  B23K2103/56

Abstract: A laser system (112, 1300) modifies a large area on an article (100) by employing a beamlet generator (1404) to provide a plurality of beamlets (1408) to a beamlet selection device (2350) whose operation is synchronized with movement of a beam steering system (1370) to variably select a number and spatial arrangement of beamlets (1408) to propagate a variable pattern of spot areas (302) to the article (100).

Abstract translation: 激光系统（112,1300）通过使用子束发生器（1404）来修改物品（100）上的大面积，以向多个子束（1408）提供多个子束（1408），该小射束（1408）的操作与 波束转向系统（1370），用于可变地选择子束（1408）的数量和空间布置，以将斑点区域（302）的可变图案传播到物品（100）。

公开(公告)号：US12070819B2

公开(公告)日：2024-08-27

申请号：US17272155

申请日：2019-10-02

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Hisashi Matsumoto ,  Jan Kleinert ,  Zhibin Lin

IPC: B23K26/382 ,  B23K26/0622 ,  B23K26/402 ,  B23K103/00

CPC classification number: B23K26/382 ,  B23K26/0624 ,  B23K26/402 ,  B23K2103/50

Abstract: A method for forming a through-via in a substrate having opposing first and second surfaces can include directing a focused beam of laser pulses into the substrate through the first surface of the substrate and, subsequently, through the second surface of the substrate. The focused beam of laser pulses can have a wavelength to which the substrate is at least substantially transparent and a beam waist of the focused beam of laser pulses is closer to the second surface than to the first surface. The focused beam of laser pulses is characterized by a pulse repetition rate, a peak optical intensity at the substrate and an average power at the substrate sufficient to: melt a region of the substrate near the second surface, thereby creating a melt zone within the substrate; propagate the melt zone toward the first surface; and vaporize or boil material of the substrate and located within the melt zone.

公开(公告)号：US11077526B2

公开(公告)日：2021-08-03

申请号：US15750140

申请日：2016-09-08

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Jan Kleinert ,  Zhibin Lin ,  Hisashi Matsumoto

IPC: B23K26/08 ,  B23K26/382 ,  B23K26/082 ,  B23K26/0622 ,  B23K26/70 ,  B23K103/00

Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to processing of workpieces in a manner resulting in enhanced accuracy, throughput, etc. Other embodiments relate to realtime Z-height measurement and, when suitable, compensation for certain Z-height deviations. Still other embodiments relate to modulation of scan patterns, beam characteristics, etc., to facilitate feature formation, avoid undesirable heat accumulation, or otherwise enhance processing throughput. A great number of other embodiments and arrangements are also detailed.

公开(公告)号：US10213871B2

公开(公告)日：2019-02-26

申请号：US14059029

申请日：2013-10-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Jan Kleinert ,  Robert Reichenbach ,  Mark Unrath ,  Hisashi Matsumoto ,  Jefferey Howerton ,  Mehmet E. Alpay ,  Andy Moore

IPC: B23K26/00 ,  B23K26/02 ,  B23K26/082 ,  B23K26/352

Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.

公开(公告)号：US09981357B2

公开(公告)日：2018-05-29

申请号：US15188496

申请日：2016-06-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian Xu ,  Jan Kleinert ,  Zhibin Lin ,  James D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: G06F19/00 ,  G05B19/18 ,  B23Q15/14 ,  G05B19/402

CPC classification number: B23Q15/14 ,  G05B19/402 ,  G05B2219/34015 ,  G05B2219/50218

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

公开(公告)号：US09776277B2

公开(公告)日：2017-10-03

申请号：US14214649

申请日：2014-03-14

Applicant: Electro Scientific Industries, Inc.

Inventor： Jan Kleinert

IPC: B23K26/06 ,  B23K26/03 ,  B23K26/067 ,  B23K26/035 ,  H01S3/10 ,  H01S3/067 ,  H01S3/00

CPC classification number: B23K26/03 ,  B23K26/035 ,  B23K26/0676 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/06737 ,  H01S3/06741 ,  H01S3/06754 ,  H01S3/1003 ,  H01S3/10053 ,  Y10T29/49165

Abstract: An apparatus includes a splitter configured to split a laser beam into a plurality of beamlets, a phase modulator array optically coupled to the splitter and operative to produce phase differences between the beamlets, phase modulation electronics operably coupled to the phase modulator and configured to control an operation of the phase modulator array, a multicore photonic crystal fiber amplifier, the multicore photonic crystal fiber amplifier configured to amplify the beamlets output by the phase modulator array, thereby producing an amplified laser beam at an output thereof, and a waveguide optically coupled between an output of the phase modulator array and an input of the multicore photonic crystal fiber amplifier.

公开(公告)号：US11185957B2

公开(公告)日：2021-11-30

申请号：US16854207

申请日：2020-04-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian Xu ,  Jan Kleinert ,  Zhibin Lin ,  James D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: G05B19/23 ,  B23Q15/14 ,  G05B19/19 ,  G05B19/402

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

公开(公告)号：US20210362277A1

公开(公告)日：2021-11-25

申请号：US17047254

申请日：2019-06-04

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Patrick Riechel ,  Mark Unrath ,  Jake Roberts ,  Joseph Hasty ,  James Brookhyser ,  Zachary Dunn ,  Christopher Hamner ,  Geoffrey Lott ,  Jacob Magers ,  Jack Rundel ,  Jeffrey Howerton ,  Jan Kleinert ,  Doug Hall ,  Gary Larsen ,  Julie Wilson ,  Lee Petersen ,  Mark Wegner ,  Kurt Eaton

IPC: B23K26/70 ,  B23K26/08 ,  B23K26/03 ,  B23K26/067 ,  B23K26/082 ,  B65H18/10 ,  G02F1/33 ,  G02B27/10

Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to use of beam characterization tools to facilitate adaptive processing, process control and other desirable features. Other embodiments relate to laser power sensors incorporating integrating spheres. Still other embodiments relate to workpiece handling systems capable of simultaneously providing different workpieces to a common laser-processing apparatus. A great number of other embodiments and arrangements are also detailed.