- 专利标题: VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAY WITH ISOLATED CATHODES AND A COMMON ANODE
-
申请号: US17135511申请日: 2020-12-28
-
公开(公告)号: US20210399525A1公开(公告)日: 2021-12-23
- 发明人: Guowei ZHAO , Matthew Glenn PETERS , Jun YANG , Eric R. HEGBLOM
- 申请人: Lumentum Operations LLC
- 申请人地址: US CA San Jose
- 专利权人: Lumentum Operations LLC
- 当前专利权人: Lumentum Operations LLC
- 当前专利权人地址: US CA San Jose
- 主分类号: H01S5/183
- IPC分类号: H01S5/183 ; H01S5/34 ; H01S5/042 ; H01S5/42
摘要:
A vertical-cavity surface-emitting laser (VCSEL) array may include an n-type substrate layer and an n-type metal on a bottom surface of the n-type substrate layer. The n-type metal may form a common anode for a group of VCSEL. The VCSEL array may include a bottom mirror structure on a top surface of the n-type substrate layer. The bottom mirror structure may include one or more bottom mirror sections and a tunnel junction to reverse a carrier type within the bottom mirror structure. The VCSEL array may include an active region on the bottom mirror structure and an oxidation layer to provide optical and electrical confinement. The VCSEL array may include an n-type top mirror on the active region, a top contact layer over the n-type top mirror, and a top metal on the top contact layer. The top metal may form an isolated cathode for the VCSEL array.
公开/授权文献
信息查询