- 专利标题： FACEPLATE TENSIONING METHOD AND APPARATUS TO PREVENT DROOP
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申请号： US17365727申请日： 2021-07-01
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公开(公告)号： US20220008946A1公开(公告)日： 2022-01-13
- 发明人: Yao-Hung YANG , Shantanu Rajiv GADGIL , Tanmay Pramod GURJAR , Sudhir R. GONDHALEKAR
- 申请人： APPLIED MATERIALS, INC.
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： B05B15/18
- IPC分类号： B05B15/18 ; C23C16/455 ; B05B1/18
摘要：
Embodiments of showerheads for use in a process chamber and methods of reducing drooping of a showerhead faceplate are provided herein. In some embodiments, a showerhead for use in a process chamber includes: a faceplate having a plurality of gas distribution holes disposed therethrough; and one or more cables that engage with the faceplate and configured to prestress the faceplate.
公开/授权文献
- US12011731B2 Faceplate tensioning method and apparatus to prevent droop 公开/授权日：2024-06-18
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