公开(公告)号：US20240307908A1

公开(公告)日：2024-09-19

申请号：US18671616

申请日：2024-05-22

Applicant: Applied Materials, Inc.

Inventor： Yao-Hung YANG ,  Shantanu Rajiv GADGIL ,  Tanmay Pramod GURJAR ,  Sudhir R. GONDHALEKAR

IPC: B05B15/18 ,  B05B1/18 ,  C23C16/455

CPC classification number: B05B15/18 ,  B05B1/18 ,  C23C16/45565

Abstract: Embodiments of showerheads for use in a process chamber and methods of reducing drooping of a showerhead faceplate are provided herein. In some embodiments, a method of reducing drooping of a faceplate for use in a process chamber includes: applying a compressive force to the faceplate via one or more cables that engage with the faceplate proximate an outer periphery thereof.

公开(公告)号：US20220008946A1

公开(公告)日：2022-01-13

申请号：US17365727

申请日：2021-07-01

Applicant: APPLIED MATERIALS, INC.

Inventor： Yao-Hung YANG ,  Shantanu Rajiv GADGIL ,  Tanmay Pramod GURJAR ,  Sudhir R. GONDHALEKAR

IPC: B05B15/18 ,  C23C16/455 ,  B05B1/18

Abstract: Embodiments of showerheads for use in a process chamber and methods of reducing drooping of a showerhead faceplate are provided herein. In some embodiments, a showerhead for use in a process chamber includes: a faceplate having a plurality of gas distribution holes disposed therethrough; and one or more cables that engage with the faceplate and configured to prestress the faceplate.