- 专利标题: Method and Structure for Sensors on Glass
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申请号: US17357234申请日: 2021-06-24
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公开(公告)号: US20220009771A1公开(公告)日: 2022-01-13
- 发明人: Stephan Pindl , Carsten Ahrens , Stefan Jost , Ulrich Krumbein
- 申请人: Infineon Technologies AG
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 优先权: EP20185153 20200710
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; B81B3/00
摘要:
A method for providing a semiconductor layer arrangement on a substrate which comprises providing a semiconductor layer arrangement having a functional layer and a semiconductor substrate layer, attaching the semiconductor layer arrangement to a glass substrate layer such that the functional layer is arranged between the glass substrate layer and the semiconductor substrate layer, and removing the semiconductor substrate layer at least partially such that the glass substrate layer substitutes the semiconductor substrate layer as the substrate of the semiconductor layer arrangement.
公开/授权文献
- US11608265B2 Method and structure for sensors on glass 公开/授权日:2023-03-21
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