- 专利标题: POLISHING APPARATUS AND POLISHING METHOD
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申请号: US17347755申请日: 2021-06-15
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公开(公告)号: US20220016740A1公开(公告)日: 2022-01-20
- 发明人: Toshiyuki MORIYA , Takamasa SUZUKI
- 申请人: DISCO CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: DISCO CORPORATION
- 当前专利权人: DISCO CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2020-120358 20200714
- 主分类号: B24B37/20
- IPC分类号: B24B37/20 ; B24B53/017 ; B24B37/30
摘要:
A polishing apparatus for polishing a workpiece includes a chuck table having a holding surface for holding the workpiece placed on the holding surface under suction thereon, a polishing unit for polishing the workpiece held on the chuck table with a polishing pad while supplying a slurry to the workpiece, and a high-pressure steam ejecting unit having a nozzle for ejecting high-pressure steam to the holding surface of the chuck table. The high-pressure steam ejecting unit ejects high-pressure steam to swarf produced from polishing the workpiece and deposited on an outer circumferential portion of the holding surface for thereby removing the swarf from the holding surface.
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