Invention Application
- Patent Title: BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
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Application No.: US17191786Application Date: 2021-03-04
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Publication No.: US20220076988A1Publication Date: 2022-03-10
- Inventor: Hui CHEN , Xinning LUAN , Kirk Allen FISHER , Shawn Joseph BONHAM , Aimee S. ERHARDT , Zhepeng CONG , Shaofeng CHEN , Schubert S. CHU , James M. AMOS , Philip Michael AMOS , John NEWMAN
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/687
- IPC: H01L21/687 ; C23C16/458 ; C23C16/32
Abstract:
A susceptor for use in a processing chamber for supporting a wafer includes a susceptor substrate having a front side and a back side opposite the front side, and a coating layer deposited on the susceptor substrate. The front side has a pocket configured to hold a wafer to be processed in a processing chamber, the pocket being textured with a first pattern. The back side is textured with a second pattern.
Information query
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