SEMICONDUCTOR STRUCTURE FOR DIGITAL AND RADIOFREQUENCY APPLICATIONS
Abstract:
A semiconductor-on-insulator multilayer structure, comprises: —a stack, called the back stack, of the following layers from a back side to a front side of the structure: a semiconductor carrier substrate the electrical resistivity of which is between 500 Ω·cm and 30 kΩ·cm, a first electrically insulating layer, a first semiconductor layer, —at least one trench isolation that extends through the back stack at least down to the first electrically insulating layer), and that electrically isolates two adjacent regions of the multilayer structure, the multilayer structure being characterized in that it further comprises at least one FD-SOI first region, and at least one RF-SOI second region.
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