Invention Application
- Patent Title: METHODS AND APPARATUS FOR IN-SITU DEPOSITION MONITORING
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Application No.: US17019949Application Date: 2020-09-14
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Publication No.: US20220081758A1Publication Date: 2022-03-17
- Inventor: Xiaodong WANG , Michael Charles KUTNEY , Varoujan CHAKARIAN , Jianxin LEI , Rongjun WANG
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: C23C14/54
- IPC: C23C14/54 ; C23C14/50 ; C23C14/24

Abstract:
Methods and apparatus that monitors deposition on a shutter disk in-situ. In some embodiments that apparatus may include a process chamber with an internal processing volume, an enclosure disposed external to the internal processing volume where the enclosure accepts a shutter disk when the shutter disk is not in use in the internal processing volume, a shutter disk arm that moves the shutter disk back and forth from the enclosure to the internal processing volume, and at least one sensor integrated into the enclosure. The at least one sensor is configured to determine at least one film property of a material deposited on the shutter disk after a pasting process in the internal processing volume.
Information query
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