METHODS AND APPARATUS FOR IN-SITU DEPOSITION MONITORING

    公开(公告)号:US20220081758A1

    公开(公告)日:2022-03-17

    申请号:US17019949

    申请日:2020-09-14

    Abstract: Methods and apparatus that monitors deposition on a shutter disk in-situ. In some embodiments that apparatus may include a process chamber with an internal processing volume, an enclosure disposed external to the internal processing volume where the enclosure accepts a shutter disk when the shutter disk is not in use in the internal processing volume, a shutter disk arm that moves the shutter disk back and forth from the enclosure to the internal processing volume, and at least one sensor integrated into the enclosure. The at least one sensor is configured to determine at least one film property of a material deposited on the shutter disk after a pasting process in the internal processing volume.

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