Invention Application
- Patent Title: SIDE STORAGE PODS, EQUIPMENT FRONT END MODULES, AND METHODS FOR OPERATING EFEMS
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Application No.: US17532954Application Date: 2021-11-22
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Publication No.: US20220084860A1Publication Date: 2022-03-17
- Inventor: Paul B. Reuter , Dean C. Hruzek , Nir Merry , John C. Menk , Douglas B. Baumgarten
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677 ; H01L21/67
Abstract:
Electronic device processing systems including an equipment front end module (EFEM) with a side storage pod are described. The EFEM includes an EFEM chamber and a recirculation duct. The side storage pod is fluidly coupled to the recirculation duct. The side storage pod includes an interior chamber and a side storage container disposed within the interior chamber. The side storage container is configured to receive one or more substrates from the EFEM chamber. The electronic device processing system further includes an environmental control system. The environmental control system is configured to circulate a purge gas between the EFEM chamber and the side storage pod via the recirculation duct.
Public/Granted literature
- US11640915B2 Side storage pods, equipment front end modules, and methods for operating EFEMs Public/Granted day:2023-05-02
Information query
IPC分类:
