Invention Application
- Patent Title: Integrated Assemblies and Methods of Forming Integrated Assemblies
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Application No.: US17021793Application Date: 2020-09-15
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Publication No.: US20220084906A1Publication Date: 2022-03-17
- Inventor: Zhuo Chen , Irina V. Vasilyeva , Darwin Franseda Fan , Kamal Kumar Muthukrishnan
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L27/108 ; H01L27/11504 ; H01L27/11509 ; H01L27/11507 ; H01L21/48

Abstract:
Some embodiments include a method of forming an integrated assembly. Semiconductor material is patterned into a configuration which includes a set of first upwardly-projecting structures spaced from one another by first gaps, and a second upwardly-projecting structure spaced from the set by a second gap. The second gap is larger than the first gaps. Conductive material is formed along the first and second upwardly-projecting structures and within the first and second gaps. First and second segments of protective material are formed over regions of the conductive material within the second gap, and then an etch is utilized to pattern the conductive material into first conductive structures within the first gaps and into second conductive structures within the second gap. Some embodiments include integrated assemblies.
Public/Granted literature
- US11335626B2 Integrated assemblies and methods of forming integrated assemblies Public/Granted day:2022-05-17
Information query
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