Invention Application
- Patent Title: WRAP-AROUND CONTACT STRUCTURES FOR SEMICONDUCTOR FINS
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Application No.: US17542191Application Date: 2021-12-03
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Publication No.: US20220093460A1Publication Date: 2022-03-24
- Inventor: Rishabh MEHANDRU
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L29/78 ; H01L29/08 ; H01L29/06 ; H01L23/535 ; H01L29/66

Abstract:
Wrap-around contact structures for semiconductor fins, and methods of fabricating wrap-around contact structures for semiconductor fins, are described. In an example, an integrated circuit structure includes a semiconductor fin having a first portion protruding through a trench isolation region. A gate structure is over a top and along sidewalls of the first portion of the semiconductor fin. A source or drain region is at a first side of the gate structure, the source or drain region including an epitaxial structure on a second portion of the semiconductor fin. The epitaxial structure has substantially vertical sidewalls in alignment with the second portion of the semiconductor fin. A conductive contact structure is along sidewalls of the second portion of the semiconductor fin and along the substantially vertical sidewalls of the epitaxial structure.
Public/Granted literature
- US11688637B2 Wrap-around contact structures for semiconductor fins Public/Granted day:2023-06-27
Information query
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