Invention Application
- Patent Title: HIGH VOLTAGE FIELD EFFECT TRANSISTOR WITH VERTICAL CURRENT PATHS AND METHOD OF MAKING THE SAME
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Application No.: US17063084Application Date: 2020-10-05
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Publication No.: US20220109054A1Publication Date: 2022-04-07
- Inventor: Mitsuhiro TOGO
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/66 ; H01L29/06 ; H01L29/78 ; H01L29/40

Abstract:
A field effect transistor for a high voltage operation can include vertical current paths, which may include vertical surface regions of a pedestal semiconductor portion that protrudes above a base semiconductor portion. The pedestal semiconductor portion can be formed by etching a semiconductor material layer employing a gate structure as an etch mask. A dielectric gate spacer can be formed on sidewalls of the pedestal semiconductor portion. A source region and a drain region may be formed underneath top surfaces of the base semiconductor portion. Alternatively, epitaxial semiconductor material portions can be grown on the top surfaces of the base semiconductor portions, and a source region and a drain region can be formed therein. Alternatively, a source region and a drain region can be formed within via cavities in a planarization dielectric layer.
Public/Granted literature
- US11978774B2 High voltage field effect transistor with vertical current paths and method of making the same Public/Granted day:2024-05-07
Information query
IPC分类: