Invention Application
- Patent Title: METHOD AND COMPUTING DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Application No.: US17360365Application Date: 2021-06-28
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Publication No.: US20220121107A1Publication Date: 2022-04-21
- Inventor: Akio MISAKA , Changsoo KIM , Noyoung CHUNG
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0134995 20201019
- Main IPC: G03F1/36
- IPC: G03F1/36 ; G06F30/392

Abstract:
A non-transitory computer-readable medium storing codes that, when executed by a processor, cause the processor to perform operations of receiving full chip data including specific patterns of a first layout, extracting a representative pattern of the first layout from the full chip data, generating a vector of the extracted representative pattern, generating a first data set based on the generated vector, generating a machine learning model by performing machine learning with respect to the first data set, executing an optical proximity correction (OPC) with respect to the specific patterns of the first layout by using the machine learning model, and generating a second layout based on a result of executing the OPC may be provided.
Public/Granted literature
- US11698581B2 Method and computing device for manufacturing semiconductor device Public/Granted day:2023-07-11
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