- 专利标题: ELECTRIC FIELD VARIABLE GAS SENSOR INCLUDING GAS MOLECULE ADSORPTION INDUCING MATERIAL AND MANUFACTURING METHOD THEREOF
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申请号: US17485733申请日: 2021-09-27
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公开(公告)号: US20220136995A1公开(公告)日: 2022-05-05
- 发明人: Woo Jong YU , Young Rae KIM , Thanh Luan PHAN
- 申请人: RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
- 申请人地址: KR Suwon-si
- 专利权人: RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
- 当前专利权人: RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2020-0142343 20201029
- 主分类号: G01N27/414
- IPC分类号: G01N27/414
摘要:
An electric field variable gas sensor includes a semiconductor substrate, an insulating film disposed on the semiconductor substrate, a semiconductor thin film material disposed on a part of the semiconductor substrate and a part of the insulating film, a gas molecule adsorption inducing material disposed on the semiconductor thin film material, a first electrode disposed on the semiconductor substrate to be spaced apart from the semiconductor thin film material, and a second electrode disposed on the insulating film to be connected with the semiconductor thin film material.
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