- 专利标题： CLEANING AGENT COMPOSITION AND CLEANING METHOD
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申请号： US17430962申请日： 2020-02-14
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公开(公告)号： US20220145218A1公开(公告)日： 2022-05-12
- 发明人: Hiroshi OGINO , Tetsuya SHINJO , Ryo KARASAWA , Takahisa OKUNO
- 申请人： NISSAN CHEMICAL CORPORATION
- 申请人地址： JP Tokyo
- 专利权人： NISSAN CHEMICAL CORPORATION
- 当前专利权人： NISSAN CHEMICAL CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2019-026052 20190215
- 国际申请： PCT/JP2020/005808 WO 20200214
- 主分类号： C11D3/30
- IPC分类号： C11D3/30 ; C11D3/24 ; C11D3/28 ; C11D3/43 ; C11D11/00 ; H01L21/02 ; C09J7/30
摘要：
A cleaning agent composition for use in removal of a polysiloxane adhesive remaining on a substrate, the composition containing a tetrahydrocarbylammonium fluoride and an organic solvent, wherein the organic solvent contains an alkylene glycol dialkyl ether and a lactam compound represented by formula (1). (in formula (1), R101 represents a C1 to C6 alkyl group, and R102 represents a C1 to C6 alkylene group.)
公开/授权文献
- US11866676B2 Cleaning agent composition and cleaning method 公开/授权日：2024-01-09
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