Invention Application
- Patent Title: DIAGNOSIS APPARATUS, PLASMA PROCESSING APPARATUS AND DIAGNOSIS METHOD
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Application No.: US16971255Application Date: 2019-07-30
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Publication No.: US20220157580A1Publication Date: 2022-05-19
- Inventor: Shota Umeda , Kenji Tamaki , Masahiro Sumiya , Masaki Ishiguro
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Minato-ku, Tokyo
- International Application: PCT/JP2019/029762 WO 20190730
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G06N7/00 ; G01M99/00

Abstract:
In a diagnosis apparatus for diagnosing a state of a plasma processing apparatus, prior distribution information including a probability distribution function is previously obtained for each of first sensors by using first sensor values obtained by the first sensors in a first plasma processing apparatus, a probability distribution in each of second sensors corresponding to each of the first sensors is estimated based on the previously obtained prior distribution information and second sensor values obtained by the second sensors in a second plasma processing apparatus different from the first plasma processing apparatus, and a state of the second plasma processing apparatus is diagnosed by using the estimated probability distribution.
Public/Granted literature
- US12040167B2 Diagnosis apparatus, plasma processing apparatus and diagnosis method Public/Granted day:2024-07-16
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