Invention Application
- Patent Title: Methods of Forming Charge-Blocking Material, and Integrated Assemblies Having Charge-Blocking Material
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Application No.: US17586682Application Date: 2022-01-27
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Publication No.: US20220157850A1Publication Date: 2022-05-19
- Inventor: Pei Qiong Cheung , Zhixin Xu , Yuan Fang
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565

Abstract:
Some embodiments include a method of forming an assembly. A first stack of alternating first and second tiers is formed over a conductive structure. A first opening is formed to extend through the first stack. A sidewall of the first opening is lined with a first liner material. The first liner material is converted to a first charge-blocking material. Sacrificial material is formed within the first opening. A second stack of alternating third and fourth tiers is formed over the first stack. A second opening is formed to extend through the second stack to the sacrificial material. A second liner material is formed within the second opening, is anisotropically etched, and is then converted to a second charge-blocking material. The sacrificial material is removed. Charge-storage material, dielectric material and channel material are formed adjacent to the charge-blocking material. Some embodiments include integrated assemblies.
Public/Granted literature
- US12250818B2 Methods of forming charge-blocking material, and integrated assemblies having charge-blocking material Public/Granted day:2025-03-11
Information query
IPC分类: