Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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Application No.: US17102563Application Date: 2020-11-24
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Publication No.: US20220165746A1Publication Date: 2022-05-26
- Inventor: Guan-Ru LEE
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/522 ; H01L21/768 ; H01L27/11565

Abstract:
A semiconductor device includes a stack and a plurality of memory strings. The stack is formed on a substrate, and the stack includes conductive layers and insulating layers alternately stacked. The memory strings penetrate the stack along a first direction. Each of the memory strings includes a first conductive pillar, a second conductive pillar, a channel layer and a memory structure. The first conductive pillar and the second conductive pillar extend along the first direction, respectively, and electrically isolated to each other. The channel layer extends along the first direction. The channel layer is disposed between the first conductive pillar and the second conductive pillar, and the channel layer is coupled to the first conductive pillar and the second conductive pillar. The memory structure surrounds the first conductive pillar, the second conductive pillar and the channel layer.
Public/Granted literature
- US11476276B2 Semiconductor device and method for fabricating the same Public/Granted day:2022-10-18
Information query
IPC分类: