Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
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Application No.: US17370464Application Date: 2021-07-08
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Publication No.: US20220165887A1Publication Date: 2022-05-26
- Inventor: Seungmin SONG , Taeyong KWON , Jaehyeoung MA , Namhyun LEE
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0160177 20201125
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/092 ; H01L29/06 ; H01L29/417 ; H01L29/423 ; H01L21/02 ; H01L21/8238 ; H01L29/66

Abstract:
A semiconductor device including a substrate including a division region extending in a first direction, first and second active patterns on the substrate with the division region interposed therebetween, the first and the second active patterns being spaced apart from each other in a second direction perpendicular to the first direction, gate electrodes extending in the first direction and crossing the first and second active patterns, a first channel pattern on the first active pattern, and a second channel pattern on the second active pattern may be provided. The smallest width of the first active pattern may be smaller than the smallest width of the second active pattern, in the first direction. An end portion of the first channel pattern adjacent to the division region may include a protruding portion extending in the first direction, and the protruding portion may have a triangle shape in a plan view.
Public/Granted literature
- US11799036B2 Semiconductor device Public/Granted day:2023-10-24
Information query
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