Invention Application
- Patent Title: AMORPHOUS BORON NITRIDE FILM AND ANTI-REFLECTION COATING STRUCTURE INCLUDING THE SAME
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Application No.: US17459537Application Date: 2021-08-27
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Publication No.: US20220171098A1Publication Date: 2022-06-02
- Inventor: Taejin CHOI , Hyeonjin SHIN , Changseok LEE , Sangwon KIM
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0165074 20201130
- Main IPC: G02B1/113
- IPC: G02B1/113 ; H01L27/146 ; H01L21/027 ; H01L31/0216 ; H01L31/052 ; H01L51/52 ; G03F7/09
Abstract:
Provided are an amorphous boron nitride film and an anti-reflection coating structure including the amorphous boron nitride film. The amorphous boron nitride film has an amorphous structure including an sp3 hybrid bond and an sp2 hybrid bond, in which a ratio of the sp3 hybrid bond in the amorphous boron nitride film is less than about 20%.
Public/Granted literature
- US12061312B2 Amorphous boron nitride film and anti-reflection coating structure including the same Public/Granted day:2024-08-13
Information query
