Invention Application
- Patent Title: HERMETIC SEALING STRUCTURES IN MICROELECTRONIC ASSEMBLIES HAVING DIRECT BONDING
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Application No.: US17121093Application Date: 2020-12-14
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Publication No.: US20220189861A1Publication Date: 2022-06-16
- Inventor: Aleksandar Aleksov , Mohammad Enamul Kabir , Adel A. Elsherbini , Shawna M. Liff , Johanna M. Swan , Feras Eid
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L23/00 ; H01L23/538

Abstract:
Disclosed herein are microelectronic assemblies including microelectronic components coupled by direct bonding, and related structures and techniques. In some embodiments, a microelectronic assembly may include a first microelectronic component including a first guard ring extending through at least a portion of a thickness of and along a perimeter; a second microelectronic component including a second guard ring extending through at least a portion of a thickness of and along a perimeter, where the first and second microelectronic components are coupled by direct bonding; and a seal ring formed by coupling the first guard ring to the second guard ring. In some embodiments, a microelectronic assembly may include a microelectronic component coupled to an interposer that includes a first liner material at a first surface; a second liner material at an opposing second surface; and a perimeter wall through the interposer and connected to the first and second liner materials.
Public/Granted literature
- US12165962B2 Hermetic sealing structures in microelectronic assemblies having direct bonding Public/Granted day:2024-12-10
Information query
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